2

Optical and structural properties of SiOx and SiNx materials

Year:
1995
Language:
english
File:
PDF, 611 KB
english, 1995
7

Micromachined thermal accelerometer

Year:
2003
Language:
english
File:
PDF, 260 KB
english, 2003
10

The effect of γ-sterilization on the pH-ChemFET behaviour

Year:
2008
Language:
english
File:
PDF, 624 KB
english, 2008
11

Anemometer with hot platinum thin film

Year:
2001
Language:
english
File:
PDF, 318 KB
english, 2001
19

Residual Stress of Silicon Films Deposited by Lpcvd From Silane

Year:
1998
Language:
english
File:
PDF, 335 KB
english, 1998
36

Residual stress in silicon films deposited by LPCVD from disilane

Year:
1997
Language:
english
File:
PDF, 538 KB
english, 1997
47

Modelling of EnFETs for the creatinine detection

Year:
2006
Language:
english
File:
PDF, 424 KB
english, 2006